Towards Wafer Scale Inductive Determination of Magnetostatic and Dynamic Parameters of Magnetic Thin Films and Multilayers

摘要

We investigate an inductive probe head suitable for non-invasivecharacterization of the magnetostatic and dynamic parameters of magnetic thinfilms and multilayers on the wafer scale. The probe is based on a planarwaveguide with rearward high frequency connectors that can be brought in closecontact to the wafer surface. Inductive characterization of the magneticmaterial is carried out by vector network analyzer ferromagnetic resonance.Analysis of the field dispersion of the resonance allows the determination ofkey material parameters such as the saturation magnetization MS or theeffective damping parameter Meff. Three waveguide designs are tested. Thebroadband frequency response is characterized and the suitability for inductivedetermination of MS and Meff is compared. Integration of such probes in a waferprober could in the future allow wafer scale in-line testing of magnetostaticand dynamic key material parameters of magnetic thin films and multilayers.