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Influence of Magnetic Field Near the Substrate on Characteristics of ITO Film Deposited by RF Sputtering Method

机译：射溅物溅射衬底磁场附近磁场的影响

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Hyun-Soo Kim; Ho-Won Jang; Jong-Yoon Kang; Jin-Sang Kim; Suk-Jin Yoon; Chang-Kyo Kim;
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年度 2012
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1. Influence of O-2 admixture and sputtering pressure on the properties of ITO thin films deposited on PET substrate using RF reactive magnetron sputtering [J] . Kim YS., Park YC., Ansari SG., Surface & Coatings Technology . 2003,第2a3期

机译：O-2外加剂和溅射压力对RF反应磁控溅射沉积在PET基板上ITO薄膜性能的影响
2. Transparent conductive characteristics of Ti:ITO films deposited by RF magnetron sputtering at low substrate temperature [J] . Paeng S.-H., Park M.-W., Sung Y.-M. Surface & Coatings Technology . 2010,第S1期

机译：在低衬底温度下通过射频磁控溅射沉积的Ti：ITO薄膜的透明导电特性
3. Properties of ITO films deposited on plastic substrate by RF superimposed DC magnetron sputtering method [J] . Do-Geun Kim, Sunghun Lee, Mi-Rang Park, Diffusion and Defect Data. Solid State Data, Part B. Solid State Phenomena . 2007,第1期

机译：射频叠加直流磁控溅射法沉积在塑料基板上的ITO膜的性能
4. Properties of ITO films deposited on plastic substrate by RF superimposed DC magnetron sputtering method [C] . Do-Geun Kim, Sunghun Lee, Mi-Rang Park, IUMRS International Conference in Asia . 2007

机译：RF叠加直流磁控溅射法在塑料基板上沉积ITO薄膜的性质
5. The effect of the sputtering parameters on the ITO films deposited by RF magnetron sputtering [D] . Jung, Jihoon. 2011

机译：溅射参数对RF磁控溅射沉积ITO膜的影响
6. Influence of Oxygen Concentration on the Performance of Ultra-Thin RF Magnetron Sputter Deposited Indium Tin Oxide Films as a Top Electrode for Photovoltaic Devices [O] . Jephias Gwamuri, Murugesan Marikkannan, Jeyanthinath Mayandi, 2016

机译：氧浓度对超薄射频磁控溅射沉积铟锡氧化物薄膜作为光伏器件上电极的性能的影响
7. Influence of the substrate bias voltage on the crystallographic structure and surface composition of Ti6A14V thin films deposited by rf magnetron sputtering [O] . Alfonso J.E., Torres Trinidad José de, Marco J.F. 2006

机译：衬底偏压对射频磁控溅射沉积Ti6A14V薄膜晶体结构和表面成分的影响

Influence of Magnetic Field Near the Substrate on Characteristics of ITO Film Deposited by RF Sputtering Method

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