Love mode SAW sensors with ZnO layer operating in gas and liquid media

摘要

Novel layered surface acoustic wave (SAW) sensors, based on a ZnO/90° rotated ST-cut quartz crystal structure, were fabricated. They were employed for liquid and gas sensing applications. Their mass detection limit in liquid media is as low as 100 pg/cm2. Furthermore, these sensors are able to sense oxygen gas concentrations as low as 0.2 ppm in nitrogen gas.