Distributed-elementary-source self-regularized dyadic Green#039;s functions for modeling the massloading effect in micro-acoustic devices

摘要

A Surface-Integral-Modeling technique has been developed to solve time-harmonic boundary value problems in acoustics. The thesis focuses on describing the methodology and testing the consistency of the method. The technique establishes and utilizes the concept of Distributed-Elementary-Source Self-regularized Dyadic Green’s functions in order to analyse fully-anisotropic elastic media used in micro-acoustic devices. A given device geometry is divided into rectangular subsections and subsequently detached from the original solid body. The individual subsections are regarded as stand-alone problems and characterized independently. Consecutively, a LIBRARY of pre-calculated Dyadic Green’s Functions is generated for each isolated subsection. The content of the LIBRARY along with the proposed Sufficiency principle and Exhaustion principle, fully suffice to solve arbitrary physically-realizable boundary conditions for a given anisotropic device. A major advantage of pre-calculating Green’s functions is the ability to reduce the usage of computational resources by recycling accurately pre-computed numerical data. An additional data compression has been achieved by evaluating the Green’s functions and their spatial derivatives on bounding surfaces of the introduced isolated subsections. The underlying ideas have been explained in terms of four test examples in two- and three-dimensions. The computed results are verified against the results obtained by commercially available Finite Element Simulation package.