MPCVD processing of titanium-diffused LiNbO3 waveguides: optical characterisation and waveguide restoration

摘要

This paper presents some initial findings that explore the material properties of LiNbO3 which has been exposed to a microwave plasma-enhanced chemical vapor deposition (MPCVD) environment. The LiNbO3 was found to undergo a process known as 'reduction' when exposed to this environment. A technique was developed to reverse this process and recover the LiNbO3, which is a crucial first step towards the integration of diamond-based single photon sources with LiNbO3 waveguide technologies.