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The local crystallization in nanoscale diamond-like carbon films during annealing

机译:退火过程中纳米级类金刚石碳膜的局部结晶

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摘要

The local crystallization during annealing at 600° C in nanoscale diamond-like carbon coatings films grown by pulsed vacuum-arc deposition method was observed using modern techniques of high-resolution transmission electron microscopy. The crystallites formed by annealing have a face-centred cubic crystal structure and grow in the direction [011] as a normal to the film surface. The number and size of the crystallites depend on the initial values of the intrinsic stresses before annealing, which in turn depend on the conditions of film growth. The sizes of crystallites are 10 nm for films with initial compressive stresses of 3 GPa and 17 nm for films with initial compres- sive stresses of 12 GPa. Areas of local crystallization arising during annealing have a structure dif- ferent from the graphite
机译:使用现代的高分辨率透射电子显微镜技术,观察了通过脉冲真空电弧沉积法生长的纳米级类金刚石碳涂层膜在600°C退火过程中的局部结晶。通过退火形成的微晶具有面心立方晶体结构并且在与膜表面垂直的方向[011]上生长。微晶的数量和大小取决于退火之前的固有应力的初始值,而固有应力的初始值又取决于膜生长的条件。初始压缩应力为3 GPa的薄膜的微晶尺寸为10 nm,初始压缩应力为12 GPa的薄膜的微晶尺寸为17 nm。退火过程中产生的局部结晶区域具有与石墨不同的结构

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