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E-Skin Module with Heterogeneously Integrated Graphene Touch Sensors and CMOS Circuitry

机译:带有异质集成石墨烯触摸传感器和CmOs电路的E-skin模块

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摘要

This paper presents a flexible electronic skin (e-skin) module developed by heterogeneous integration of graphene based touch sensors and CMOS chips having basic capacitance-to-voltage converter (CVC) circuitry to acquire the sensor response. Graphene touch sensor was firstly transfer printed on a flexible polyvinyl chloride (PVC) substrate, thereafter the CMOS chip with 4×4 array of large transistors was integrated on the same PVC substrate. Then, resulting module was tested to verify the performance. The heterogeneous integration of graphene and Si based devices on the same flexible substrate is an interesting new approach that can be scaled up, opening a new opportunity for obtaining large area e-skin for robotic applications.
机译:本文提出了一种柔性电子皮肤(e-skin)模块,该模块是通过基于石墨烯的触摸传感器和具有基本电容-电压转换器(CVC)电路以获取传感器响应的CMOS芯片的异类集成而开发的。首先将石墨烯触摸传感器转移印刷在柔性聚氯乙烯(PVC)基板上,然后将具有4×4大型晶体管阵列的CMOS芯片集成在同一PVC基板上。然后,对所得模块进行测试以验证性能。石墨烯和硅基器件在同一柔性基板上的异质集成是一种有趣的新方法,可以扩大规模,这为获取用于机器人应用的大面积电子皮肤提供了新的机会。

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