Investigation of power dissipation in a collimated energy beam

摘要

To satisfy the worldwide demand for large ultra-precision optical surfaces, a fast process chain - grinding, polishing and plasma figuring- has been established by the Precision Engineering Institute at Cranfield University. The focus of Cranfield Plasma Figuring team is the creation of next generation of highly collimated energy beam for plasma figuring. Currently, plasma figuring has the capability to shorten processing duration for the correction of metre-scale optical surfaces. High form accuracy can be achieved (e.g. 2.5 hours and 31 nm RMS for 400mm diameter surface). However, it is known that Mid Spatial Frequency (MSF) surface errors are induced when the plasma figuring process is carried out. The work discussed in this paper deals with the characterisation of highly collimated plasma jets delivered by the Inductively Coupled Plasma (ICP) torches. Also a computational fluid dynamics (CFD) model is introduced. This model is used to assess the behaviour of the plasma jet within the best known processing condition. Finally temperature measurement experiments were performed to determine the energy dissipated values that characterise best the ICP torch coil and its De-Laval nozzle.