A descriptive model of the current microelectromechanical systems (MEMS) development process

摘要

This paper uses the IDEFØ process modelling technique to present an ‘As-Is'model for the current process of developing generic MEMS devices, this new modelis based on information from current practitioners. The model shows a seven-stage process, from customer requirement specification to testing andverification, with multiple iterative loops between several stages of the model.Process-constraints on current MEMS development are also reported in the paper.A comparison was attempted between this As-Is model and the candidate models forfuture MEMS development available in literature. Differences include the numberand placement of process iteration stages and the quantity and type of thedevelopment activities. Further comparison is difficult, partly because of thedifferent approaches, taken to represent MEMS development stages and developmentflows, used by different autho