Direct writing of lead zirconate titanate piezoelectric structures byelectrohydrodynamic atomisation.

摘要

Direct writing, consisting of the directed deposition of individual droplets ofceramic suspension using ink jet printing can be used to produce piezoelectricstructures with feature sizes in excess of 100 μm. This work presents analternative direct writing technique, consisting of directed individual dropletsproduced by electrohydrodynamic atomisation (EHDA), where feature sizes an orderof magnitude smaller can be achieved. This technique opens up the possibility ofusing direct writing technology to produce integrated MEMS devices. Low toxicitylead zirconate titantate (PZT) sol has been used in conjunction with the EHDAprocess to produce isolated features and lines with dimensions as small as 20μm. These features, when fired, form the perovskite PZT crystal structure. Usingan X–Y stage to move the sample, it is possible to create a variety of structu