Wide frequency range measurements of absolute phase and amplitude of vibrations in micro- and nanostructures by optical interferometry

摘要

A heterodyne interferometer has been built in order to characterize vibrations on micro- and nanostructures. The interferometer offers the possibility of both absolute phase and high resolution absolute amplitude vibrational measurements. By using two acousto-optic modulators (AOMs) in one of the interferometer arms and varying the frequency inputs of both, the setup is designed to measure vibrations in the entire frequency range 0 - 1.2GHz. The system is here demonstrated on Capacitor Micromachined Ultrasonic Transducers (CMUTs) and a PZT transducer to show measurements from 5kHz up to 35MHz. We have measured absolute amplitudes with picometer resolution.