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Analysis Of Factors Affecting Gravity-Induced Deflection For Large And Thin Wafers In Flatness Measurement Using Three-Point-Support Method

机译：三点支撑法测量平板度测量中大薄晶圆重力诱导挠度的影响因素分析

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Liu Haijun; Dong Zhigang; Kang Renke; Zhou Ping; Gao Shang;
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1. ANALYSIS OF FACTORS AFFECTING GRAVITY-INDUCED DEFLECTION FOR LARGE AND THIN WAFERS IN FLATNESS MEASUREMENT USING THREE-POINT-SUPPORT METHOD [J] . Liu Haijun, Dong Zhigang, Kang Renke, Metrology and Measurement Systems: Metrologia i Systemy Pomiarowe . 2015,第4期

机译：三点支持法分析平面度中大薄晶片重力引起的挠度影响因素分析
2. ANALYSIS OF FACTORS AFFECTING GRAVITY-INDUCED DEFLECTION FOR LARGE AND THIN WAFERS IN FLATNESS MEASUREMENT USING THREE-POINT-SUPPORT METHOD [J] . Haijun Liu, Zhigang Dong, Renke Kang, Metrology and Measurement Systems: Metrologia i Systemy Pomiarowe . 2015,第4期

机译：用三点载体法测定大型薄晶片对重力引起偏转的因素分析
3. Effect of Anisotropy on Shape Measurement Accuracy of Silicon Wafer Using Three-Point-Support Inverting Method [J] . Yukihiro ITO, Wataru NATSU, Masanori KUNIEDA Journal of Advanced Mechanical Design, Systems, and Manufacturing . 2010,第5期

机译：三点支持反转法各向异性对硅片形状测量精度的影响
4. Simultaneous Measurement of Warp and Thickness of Large-Diameter Silicon Wafer Using Three-Point-Support Inverting Method [C] . Yukihiro ITO, Wataru NATSU, Masanori KUNIEDA International conference of the European Society for Precision Engineering and Nanotechnology . 2012

机译：三点支持反相法同时测量大直径硅晶片的翘曲和厚度
5. NONLINEAR DYNAMIC ANALYSIS OF FLAT PLATE LAYERED BODIES ACCOUNTING FOR LARGE TRANSVERSE DEFLECTIONS. [D] . VAN BLARICUM, PAMELA JEAN CALVETTI. 1977

机译：考虑横向横偏的扁平板分层体的非线性动力学分析。
6. A Comparative Study of the Applied Methods for Estimating Deflection of the Vertical in Terrestrial Geodetic Measurements [O] . Luca Vittuari, Maria Alessandra Tini, Pierguido Sarti, 2016

机译：估算大地测量垂直线挠度的方法的比较研究
7. Effect of Anisotropy on Shape Measurement Accuracy of Silicon Wafer Using Three-Point-Support Inverting Method [O] . Yukihiro ITO, Wataru NATSU, Masanori KUNIEDA 2010

机译：各向异性对三点载体反相方法硅晶片形状测量精度的影响
8. Analytical Methods Applied to the Measurements of Deflections and Wave Velocities on Highway Pavements. Part I. Measurements of Deflections [R] . Cogill, W. H. 1969

机译：用于公路路面挠度和波速测量的分析方法。第一部分。挠曲的测量

Analysis Of Factors Affecting Gravity-Induced Deflection For Large And Thin Wafers In Flatness Measurement Using Three-Point-Support Method

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