New Five-Standard Calibration Procedures for Network Analyzers and Wafer Probes

摘要

New calibration procedures using five two-port standards are developed fornetwork analyzer, test fixture and wafer prober environments. The theory and calibration equations for 16-term error model are shown. Based on numerical simulations, it is pointed out that five two-port calibration measurements are needed to exactly calibrate the 16 parameter error model. Possible combinations of calibration standards are studied. The nonsingular and the singular combinations are listed in Tables. The limitations of the Super-TSD algorithm are defined for the first time.