Two-Dimensional Self-Consistent Radio Frequency Plasma Simulations Relevant tothe Gaseous Electronics Conference RF Reference Cell

摘要

Over the past few years multidimensional self-consistent plasma simulationsincluding complex chemistry have been developed which are promising tools for furthering our understanding of reactive gas plasmas and for reactor design and optimization. These simulations must be benchmarked against experimental data obtained in well-characterized systems such as the Gaseous Electronics Conference (GEC) reference cell. Two-dimensional simulations relevant to the GEC Cell are reviewed in this paper with emphasis on fluid simulation.