Helsinki University of Technology Deparment of Electrical and Communications Engineering, Electron Physics Laboratory Annual Report 2001

摘要

Helsinki University of Technology (HUT) is the largest university for engineering education and research in Finland. It is located on a campus in Otaniemi (Espoo) on the west side of the capital, Helsinki. The university comprises of approximately 70 laboratories. The number of undergraduate and graduate students is about 14000 and has been rapidly growing in the recent years. The Electron Physics Laboratory (EPL) is one of the 20 laboratories in the Department of Electrical and Communications Engineering. The laboratory provides higher education and research in the field of modern semiconductor technology. The activities include semiconductor physics, processing and measurement technology of semiconductor devices, Integrated Circuit (IC) technology and micro sensors.