Workshop on Temperature Measurement of Semiconductor Wafers Using Thermocouples.

摘要

RTP'2000 is a conference for engineers, scientists, managers, and marketing specialists working in the thermal processing of semiconductors, manufacturing, simulation, and equipment development. The goal is to provide a comprehensive overview of current and future directions of thermal processing technology and processing systems. The primary emphasis is on the state-of-the-art tools, and on rapid thermal processing (RTP) and furnace concepts and methods as they apply to commercial Ultra Large Scale Integration (ULSI) processing.