Electronics and Electrical Engineering Laboratory. Office of Microelectronics Programs: Programs, Activities, and Accomplishments

摘要

;Contents: Welcome and Introduction; Vision; Values; Mission; Goals; Funding; Office of Microelectronics Programs Organization; Lithography Metrology Program; Critical Dimension and Overlay Metrology Program; Thin Film and Shallow Junction Metrology Program; Interconnect and Packaging Metrology Program; Wafer Characterization and Process Metrology Program; Test Metrology Program; Manufacturing Support; and Technical Contacts.