Mass Spectrometer Investigation of the Silicon Tetrachloride Used in Marking Pure Silicon

摘要

The silicon tetrachloride used by the du Pont Company in the process of preparing for crystal units has been analyzed with a mass spectrometer, with the view of determine how much carbon tetrachloride is present. Chemical tests made by du Pont have shown varying results, some indicating that there was up to carbon present while others showed there was practically zone. Lu Pont has been investigating the possibilities of improving the parity of their silicon under contract 262 as amended by subcontract DC-162693, temperature in order to decompose the CCL4.