Astigmatic Noncontact Optical Gauging

摘要

The research examined the feasibility of employing artificially induced optical astigmatism for noncontact gauging and coordinate measurement, particularly in relation to accuracy, range, target surface tilt, and surface optical characteristics. Experimentation showed conclusively that rms surface measurement accuracies of better than 0.1 micrometers can be achieved at normal incidence on a variety of widely different materials.