Preliminary Survey Report of Control Technology for Microelectronics Industry at Airco Corporation, Phoenix, Arizona

摘要

A walk through survey was conducted at AIRCO Corporation (SIC-3674) in Phoenix, Arizona on November 2, 1981. The survey was conducted as part of a control technology assessment of the semiconductor manufacturing industry. The facility did not produce silicon semiconductor devices, but supplied high purity gas mixtures to semiconductor manufacturers. The survey was conducted to determine if the control technology could be applied to the semiconductor fabrication industry. The facility employed 21 persons. Filling was performed in a two shift operation using nine workers. A medical surveillance program was used. There was minimal safety or evacuation training. No program existed for monitoring ventilation hood flow. All industrial hygiene controls were oriented toward ventilation and enclosures. Each of the toxic gas hoods had a selectable gas flow. Street clothes were worn by employees. Respirators and acid gas entry suits were available. The authors conclude that based on the survey, further evaluation of the facility is not recommended. Neither the process nor the controls used illustrate an exemplary control strategy. Periodic monitoring of air flow across hood faces is recommended, as are dosimetry and area monitoring.