Diamondlike Carbon and Related Films for Infrared Optical Coatings

摘要

The report describes the techniques used to prepare and characterize the results of diagnostic measurements of diamondlike carbon (DLC) and amorphous silicon-carbon films. Both carbon and silicon-carbon films were prepared on various substrates. Measurements made included: optical absorption, visible and infrared ellipsometry, sticking coefficient, hardness, Rutherford backscattering, proton analysis, Auper profiling, plasma etching. Results suggest the materials are indeed suitable for infrared coatings.