In-Depth Survey Report: Control Technology for the Microelectronics Industry at NEC Electronics USA, Mountain View, California

摘要

An indepth survey of control technology at NEC Electronics USA (SIC-3674), Mountain View, California was conducted in April, 1983. The survey was part of an industrywide study of exposures in the microelectronics industry. Engineering controls included general and exhaust ventilation, water scrubbers with mist extinguishers on each exhaust system, a state of the art gas handling system, a portable cart that pumped acidic wastes from process tanks or equipment for transfer to drums, and metal screens across viewing ports of plasma etchers to reduce radiofrequency emission exposure. Sampling was conducted for hexamethyldisilazane (999973), xylene (1330207), acetone (67641), n-butyl-acetate (123864), and ultraviolet and radiofrequency emissions. All chemical exposures except hexamethyldisilizane, for which there is no Federal standard, were below their evaluation criteria. The authors conclude that the ultraviolet emissions probably do not constitute a health hazard; however, there is a risk from radiofrequency emissions.