Semiconductor Measurement Technology: Analytic Analysis of Ellipsometric Errors

摘要

A FORTRAN program was developed that calculates the ellipsometric measurement uncertainties for two models of a surface. The first is the simple bare isotropic substrate model. The second is the isotropic nonabsorbing film-substrate model. It is assumed that the sample to be measured ellipsometrically can be best described by one of these two models.