Release Notes for STAT2 Version 1.7: An Addendum to NBS (National Bureau of Standards) Special Publication 400-75

摘要

The document describes the changes which have been made in the STAT2 computer program since its documentation in NBS Special Publication 400-75, Semiconductor Measurement Technology: A FORTRAN Program for Analysis of Data from Microelectronic Test Structures, and NBS Internal Report 83-2779, Release Notes for STAT2 Version 1.31. It is assumed that the reader has these documents, and no attempt is made to review STAT2 features or operation. The changes extend the functionality and versatility of the program. More specifically, the new features added in version 1.7 include data base extension, an input data format suitable for test sites not in a periodic array, an outlier exclusion algorithm suitable for small numbers of sites, common site exclusions for related data sets, a vector map, a scatter plot, a trend chart, extended macro command file capability, and other changes. Following the description of the changes is an annotated listing of new error messages. The document and the two previous publications cited constitute the documentation of version 1.7 of STAT2.