PRESSFET: An Integrated Electret-MOSFET Structure for Application as a Catheter Tip Blood-Pressure Sensor

摘要

The study deals with the realization of a pressure sensor for in vivo use. The basic principles of blood-pressure measurements are first discussed. Then the research and development of the integrated electret field effect structure (PRESSFET) is described step by step. The theoretical analysis of several PRESSFET structures is presented. The technologies used to realize such a structure are discussed in detail, and the experimental set-up and experimental results are described. The stability of the PRESSFET, which is required to be very high for blood-pressure measurements is examined. Finally two appendices deal with several electrical and mechanical details of the PRESSFET.