Silicon-on-Insulator: A Categorized Bibliography Including Abstracts

摘要

The bibliography of silicon-on-insulator SOI technology was compiled from a literature search of three data bases: INSPEC, Engineering Index, and Chemical Abstracts. The bibliography has been categorized according to the technique used to produce the SOI substrate. It includes the abstracts for most of the papers. It can either be used to obtain a quick evaluation of the 'state of the art' in a particular SOI technique, or as a guide for further in-depth study.