NIST (National Institute of Standards and Technology) Measurement Services: High Vacuum Standard and Its Use

摘要

The document presents an in-depth discussion of the National Institute of Standards and Technology primary high vacuum standard, used between 10 to the minus 6th power and .01 Pa. Included are discussions of the theory, design, and construction of the standard. The systematic and random errors in the standard and the methods used to check the accuracy of the standard are presented. Also included is a brief discussion of the molecular drag gage and its use as a transfer standard between .0001 and .1 Pa.