Evaluation of Environmental Control Equipment for Thin Film Silicon Photovoltaic Cell Processing: Phase 1

摘要

Thin film silicon:hydrogen alloys are commanding an increasing share of the photovoltaic marketplace. Due to the hazardous nature of the materials involved in their manufacture, it is important to control and render harmless those reactants that are not consumed as inert coating. Environmental control equipment used for such purposes must meet important safety, throughput, efficiency, and reliability requirements. This report discusses the analytical methodology and performance results obtained for various environmental systems evaluated at a photovoltaic research facility. (ERA citation 12:032623)