Evaluation of Mechanical Properties of TiN Films by Ultra-Low Load Indentation.

摘要

The mechanical properties of titanium nitride films of varying composition deposited on stainless steel substrates were studied using an indentation technique with a mechanical properties microprobe which allows measurement of film properties without contribution from the substrate material. A polishing technique was developed that gave consistent indentation measurements on films with initially rough surfaces. The elastic modulus increases linearly with increasing nitrogen content in the N:Ti range of 0.5 to 1.05, while the hardness of the film depends on other factors. Possible factors contributing to the hardness of the films are discussed. 14 refs., 4 figs., 1 tab. (ERA citation 14:024763)