Flat-Plate Solar Array Project: Experimental Process System Development Unit for Producing Semiconductor-Grade Silicon Using the Silane-to-Silicon Process

摘要

The process technology for the manufacture of semiconductor-grade silicon in a large commercial plant by 1986, at a price less than $14 per kilogram of silicon based on 1975 dollars is discussed. The engineering design, installation, checkout, and operation of an Experimental Process System Development unit was discussed. Quality control of scaling-up the process and an economic analysis of product and production costs are discussed.