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INGOT SLICING MACHINE AND METHOD

机译:INGOT sLICING maCHINE和方法

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摘要

An improvement in a method for simultaneously slicing one or a multiplicity of boules of silicon into silicon wafers, the improvement of which comprises forming a plurality of vertical stacks of horizontal saw blades of circular configuration arranged in juxtaposed coaxial alignment, each blade being characterized by having a cutting diameter slightly greater than the cutting diame¬ter of the blade arranged immediately thereabove;im¬parting simultaneous rotation to the blades, supporting in depending relation a plurality of enlongated boules of silicon, simultaneously translating the boules through the blades, and simultaneously imparting rotation to the boules as the boules are passed through said blades for slicing wafers therefrom;and an improved apparatus for performing said method.

著录项

  • 作者

    Yu Shen Kuo;

  • 作者单位
  • 年度 1984
  • 页码 1-12
  • 总页数 12
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 工业技术;
  • 关键词

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