Geometrie und Reproduzierbarkeit Einer Plasmaunterstuetzten Materialabtragung durch Laserstrahlung (Geometry and Reproducibility of a Plasma-Supported Removal of Material by Laser Radiation)

摘要

The effects of the different parameters of the process of material removal by laser radiation on the result of the treatment were investigated. The starting phase of the material treatment is determined by the heating of the target. The interaction between laser radiation and target is determined by the laser-induced plasma, the effect of which on the treatment is discussed. The treatment can be optimized by an adaptation of the laser intensity. The process parameters which determine the geometry of the removal of material, the removal efficiency, and the reproducibility of the geometry are discussed.