Outgassing Measurement of the Aluminum Alloy UHV (Ultrahigh Vacuum) Chamber

摘要

A large vacuum chamber (580 mm diameter) was fabricated from an aluminum alloy surface treated by a special process normally used on small chambers. The chamber was tested unbaked and baked at various temperatures, pressures, and holding periods. The chamber was filled with N2 gas, and the outgassing rate was measured after one hour. Then the ultimate pressure was measured. Outgassing rates for baked and unbaked groups were compared. It is concluded that the same surface treatment technique can be used on both large and small chambers produced by the same special extrusion process.