Feedback controlled electrostatic and electromagnetic sample positioners

摘要

Four different sample positioners are discussed. The four systems share a common operating principle in that the sample positioning is achieved by feedback controlled forces which can be electrostatic, dielectrophoretic, or electromagnetic. The first system is the electrostatic liquid drop positioner which operates at the near ambient position. The second system is the tetrahedral electrostatic positioner which is being developed for the high temperature materials processing in vacuum. The third system is essentially the the same tetrahedral system above except that the position control is achieved by dielectrophoretic forces in the pressurized gas environment. Finally, the feasibility of a feedback controlled electromagnetic positioner is discussed.