Five degree-of-freedom control of an ultra-precision magnetically-suspended linear bearing

摘要

The authors constructed a high precision linear bearing. A 10.7 kg platen measuring 125 mm by 125 mm by 350 mm is suspended and controlled in five degrees of freedom by seven electromagnets. The position of the platen is measured by five capacitive probes which have nanometer resolution. The suspension acts as a linear bearing, allowing linear travel of 50 mm in the sixth degree of freedom. In the laboratory, this bearing system has demonstrated position stability of 5 nm peak-to-peak. This is believed to be the highest position stability yet demonstrated in a magnetic suspension system. Performance at this level confirms that magnetic suspensions can address motion control requirements at the nanometer level. The experimental effort associated with this linear bearing system is described. Major topics are the development of models for the suspension, implementation of control algorithms, and measurement of the actual bearing performance. Suggestions for the future improvement of the bearing system are given.