Analysis of Trace Halocarbon Contaminants in Ultra High Purity Helium

摘要

This study describes the analysis of ultra high purity helium. Purificationstudies were conducted and containment removal was effected by the utilization of solid adsorbent purge-trap systems at cryogenic temperatures. Volatile organic compounds in ultra high purity helium were adsorbed on a solid adsorbent-cryogenic trap, and thermally desorbed trace halocarbon and other contaminants were analyzed by combined gas chromatography-mass spectrometry.