Predicted Variations in Flow Patterns in a Horizontal CVD Reactor

摘要

Expressions in terms of common reactor operating parameters were derived for the ratio of the Grashof number to the Reynolds number, Gr/Re, the ratio of the Grashof to the square of 2 the Reynolds number, Gr/Re(exp 2), and the Rayleigh number, Ra. Values for these numbers were computed for an example horizontal CVD reactor and compared to numerical simulations to gauge their effectiveness as predictors of the presence or absence of transverse and longitudinal rolls in the reactor. Comparisons were made for both argon and hydrogen carrier gases over the pressure range 2- 101 kPa. Reasonable agreement was achieved in most cases when using Gr/Re to predict the presence of transverse rolls and Ra to predict the presence of longitudinal rolls. The ratio Gr/Re(exp 2) did not yield useful predictions regarding the presence of transverse rolls. This comparison showed that the ratio of the Grashof number to the Reynolds number, as well as the Rayleigh number, can be used to predict the presence or absence of transverse and longitudinal rolls in a horizontal CVD reactor for a given set of reactor conditions. These predictions are approximate, and care must be exercised when making predictions near transition regions.