An investigation of thin film oxygen partial pressure sensors

机译：薄膜氧分压传感器的研究

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Product development and testing of thin film oxygen partial pressure sensors

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Monteith, L. K.; Royal, T. M.; Wortman, J. J.;
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年度 1968
页码 1-61
总页数 61
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
ELECTRONIC EQUIPMENT TESTS; OXYGEN; PARTIAL PRESSURE; PRESSURE SENSORS; PRODUCT DEVELOPMENT; THIN FILMS; CONTROLLED ATMOSPHERES; ELECTRICAL RESISTIVITY; HIGH TEMPERATURE TESTS; PERFORMANCE TESTS; PHOTOCONDUCTIVITY; RESISTANCE THERMOMETERS; SEMICONDUCTING FILMS; TIN OXIDES; ZINC OXIDES;

机译：电子设备测试;氧;分压;压力传感器;产品开发;薄膜;受控大气;电阻率;高温测试;性能测试;光电导;阻力温度计;半导体薄膜; TIN OXIDEs;锌氧化物;

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1. Contribution of oxygen partial pressures investigated over a wide range to SrRuO_3 thin-film properties in laser deposition processing [J] . Y. Z. Yoo, O. Chmaissem, S. Kolesnik, Journal of Applied Physics . 2005,第10Pt1期

机译：广泛研究的氧分压对激光沉积过程中SrRuO_3薄膜性能的影响
2. Investigation of the effect of different oxygen partial pressure to LaAlO_3 thin film properties and resistive switching characteristics [J] . Kou-ChenLiu, Wen-Hsien Tzeng, Kow-Ming Chang, Thin Solid Films . 2011,第4期

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3. Controlling Oxygen Content by Varying Oxygen Partial Pressure in Chromium Oxynitride Thin Films Prepared by Pulsed Laser Deposition [J] . Kazuma Suzuki, Toshiyuki Endo, Teruhisa Fukushima Materials transactions . 2013,第7期

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4. Light irradiation history sensor using amorphous In-Ga-Zn-O thin-film transistor fabricated by high oxygen partial pressure sputtering [C] . Hasegwa Takayuki, Kimura Mutsumi, Ide Keisuke, 2012 Nineteenth International Workshop on Active-Matrix Flatpanel Displays and Devices : TFT Technologies and FPD Materials . 2012

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5. Luminescent Water-Soluble Oxygen-Sensor Films and Their Application in Pressure Sensitive Paints. [D] . Habibagahi, Arezoo. 2010

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6. The effect of substrate temperature and oxygen partial pressure on the properties of nanocrystalline copper oxide thin films grown by pulsed laser deposition [O] . Syed Farid Uddin Farhad 2021

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7. Influences of Substrate Temperatures and Oxygen Partial Pressures on the Crystal Structure, Morphology and Luminescence Properties of Pulsed Laser Deposited Bi2O3:Ho3+ Thin Films [O] . Divya Janardhana, Shivaramu N. Jayaramu, Wiets D. Roos, 2020

机译：脉冲激光沉积Bi2O3：HO3 +薄膜晶体结构对晶体结构，形态学和发光性能的影响：HO3 +薄膜

An investigation of thin film oxygen partial pressure sensors

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