Molecular beam mass spectrometry studies of the chemical vapor deposition of diamond

摘要

We have developed a novel molecular beam mass spectrometry technique that can quantitatively analyze the gas-phase composition in a CVD reactor. The technique simultaneously monitors a wide variety of radical and stable species, and their concentrations can be determined with sensitivities approaching 1 ppM. Measurements performed in a diamond deposition system have given us keen insights into the important phenomena that affect the growth environment. This paper first discusses the primary gas sampling design issues. In the second part, the details of the experimental results and their implications will be described.