Micromachined actuator and sensor capabilities at the Microelectronics Development Laboratory.

摘要

This paper briefly summarizes micromachined actuator and sensor capabilities at the Microelectronics Development Laboratory (MDL) of Sandia National Laboratories. These include efforts utilizing either bulk or surface micromachining with silicon substrates. On going developmental projects utilizing both surface and bulk micromachining along with the MDL's effort to integrate a baseline CMOS process with micromachined elements are presented. The paper is broadly divided into three major headings: Surface Micromachined Projects, Bulk Micromachined Projects, and the CMOS/Micromachining Integration Project.