Equivalent performance in different helical resonator plasma polymerization coater platforms

摘要

Plasma polymerization is used in fabricating target mandrels for implosion experiments on the NOVA laser. As part of effort to translate the theoretical aspects of plasma polymerization fundamentals into practical improvements in a production oriented environment, a study was done to determine the cause of differences in polymer deposition characteristics between two similar plasma polymerization devices. Full characterization of the coating system parameters revealed differences in the flow rate, RF power dissipation and system pressure which were subsequently changed to make the coaters equivalent in this sense; this was found insufficient to ensure equivalent performance. An experiment designed to test effect of changing operating conditions of helical resonator plasma applicator indicated that the cause of performance discrepancy did not lie with the plasma generation equipment. Substrate positioning was found to be a critical factor in determining the deposition rate of plasma polymer but played no significant role in the development of rough surfaces. Surface texture was dependent gas flow rates and RF power dissipation.