Materials processing using a variable frequency microwave furnace

摘要

We describe a materials processing system that uses a high power traveling wave tube (TWT) as the microwave source. The TWT provides approximately one octave bandwidth and variable power levels up to 2 kW into a multimode cavity. By controlling the frequency, efficient coupling to the load can be maintained even as the load's dielectric properties change. Alternatively, can be used as a means of mode stirring at rates far beyond those attainable through mechanical stirring. The system has been tested for sintering alumina ceramics, annealing a tungsten penetrator alloy, curing epoxy resin, and depositing diamond films from a microwave plasma. (ERA citation 19:033618)