In-situ TEM crystallization of sol-gel derived BaTiO3 thin films

摘要

Plan view and cross sectional view samples of pyrolyzed Ba-Ti methoxypropoxide films on (100)Si were prepared in the amorphous form. In-situ hot stage experiments were conducted in a Philips CM30 to follow the crystallization process. With time at 750C, large grains nucleated mostly at the BaTiO3 surface; the regions near the Si did not crystallize. (ERA citation 19:022020)