Influence of wavelength-dependent radiation in simulation of lamp-heated rapid thermal processing systems

摘要

Understanding the thermal response of lamp-heated rapid thermal processing (RTP) systems requires understanding relatively complex radiation exchange among opaque and partially transmitting surfaces and materials. The objective of this paper is to investigate the influence of wavelength-dependent radiative properties. The examples used for the analysis consider axisymmetric systems of the kind that were developed by Texas Instruments (TI) for the Microelectronics Manufacturing Science and Technology (MMST) Program and illustrate a number of wavelength-dependent (spectral) effects. The models execute quickly on workstation class computing flatforms, and thus permit rapid comparison of alternative reactor designs and physical models. The fast execution may also permit the incorporation of these models into real-time model-based process control algorithms.