Efficiency and stray light measurements and calculations of diffraction gratings for the ALS

摘要

Water cooled gratings manufactured for spherical grating monochromators of the Advanced Light Source beamlines 7.0, 8.0 and 9.0 were measured with the laser plasma source and reflectometer in the Center for X-ray Optics at LBL. The square-wave gratings are ion-milled into the polished electroless nickel surface after patterning by holographic photolithography. Absolute efficiency data are compared with exact electromagnetic theory calculation. Inter-order stray light and groove depths can be estimated from the measurements.