Sputter roughening instability on the Ge(001) surface: Energy and flux dependence

摘要

We have measured surface roughening kinetics during low energy Xe ion sputtering of Ge (001) surfaces. Results are interpreted in terms of an instability theory developed by Bradley and Harper. Although the calculated magnitude of the roughening rate does not agree with the measured value, the variation of the rate with ion flux and energy is on agreement with the theory.