Systematic study of the ion beam mixing of oxide markers into alumina

摘要

The study of ion beam mixing of layered compositions is important in two regards: first, there is the potential of alloying the layers into a new functionally different composition and, secondly, from a fundamental aspect, it is important be able to anticipate the potential damage due to degradation of the layer structure that could be caused in these materials due to a radiation environment. The authors have completed a systematic study of ion beam mixing of thin marker layers into amorphous alumina. The degree of mixing was found to be controlled by thermodynamic factors, the nature of the marker (oxidation state), and matrix crystallinity. Ballistic mixing was observed for all markers, but the mixing of some oxide markers exhibits a thermally activated regime at higher temperatures. The experiments were conducted from a low temperature of (minus)170 C to a maximum temperature of 75O C. 210 keV Ar was used to ion beam mix the marker layer at the various temperatures. The marker spreading was analyzed using RBS. The mixing of one marker (Fe(sub 2)O(sub 3)) into crystalline alumina (sapphire) was compared to that of the amorphous alumina. It was found that the marker mixed asymmetrically into the two matrix materials, with a higher degree of mixing into the amorphous matrix. TEM cross-section results verify that there is a preference for the marker to mix into the amorphous alumina layer preferentially to the crystalline layer. The interest in ion beam mixing of marker layers in ceramic systems is motivated by the fact that layered oxides are technologically important materials for fusion reactor applications.