Computer simulation and data compilation of sputtering yield by hydrogen isotopes ((sup 1)H(sup +), (sup 2)D(sup +), (sup 3)T(sup +)) and helium ((sup 4)He(sup +)) ion impact from monatomic solids at normal incidence

摘要

The ion-induced sputtering yields from monatomic solids at normal incidence are presented graphically for light-ion ((sup 1)H(sup +), (sup 2)D(sup +), (sup 3)T(sup +), (sup 4)He(sup +)) bombardment on various target materials as a function of the incident ion energy. To supplement the experimental data, the sputtering yields are calculated by the Monte Carlo simulation code ACAT for all possible light ion-target combinations. Each graph shows the available experimental and ACAT data points, together with the sputtering yield calculated by the Yamamura and Tawara empirical formula. (author).