Tomographic scanning microscope for 1-4 KeV x-rays

摘要

X-ray microtomography enables three-dimensional imaging at submicron resolution with elemental and chemical state contrast. The 1-4 KeV energy region is promising for microtomography of biological, microelectronics, and materials sciences specimens. To capitalize on this potential, we are constructing a tomographic scanning x-ray microscope for 1-4 KeV x-ray on a spherical grating monochromator beamline at the Advance Photon Source. The microscope, which uses zone plate optics, has an anticipated spatial resolution of 100 nm and an energy resolution of better than 1 eV.