Ion kogaku gijutsu shuho wo mochiita shinki hikari sensor sosei ni kansuru kenkyu. (Research on creating new light sensors using ion engineering technologies and methods).

摘要

In order to develop a new functional light sensor with a new material structure, the fabrication of organic-inorganic hetero nanostructures using ion engineering technology has been investigated. For thin-film fabrication of CuPc, copper phthalocyanine and C(sub 60) single-films using ion cluster beam method, both molecules yielded high-quality molecular crystal film when an ion acceleration voltage of several hundred volts was applied. In the case of TiOx film formation on CuPc film, the interface of heterojunction was able to be controlled to exhibit no damage in several molecular layers deep. It was found that the CuPc layer is an alpha-type molecular crystal whose b-axis runs parallel to the boundary, and its flatness at the boundary is less than 1 nm. For the formation of metal electrodes on CuPc organic crystal film, there was no deterioration of CuPc molecular crystal near the interface. The CuPc-TiOx heterojunction structures were sensitive in terms of light sensing capability to light at wavelengths between 550 and 750 nm due to the electronic properties of CuPc molecular crystals. 15 refs., 26 figs.